A new theoretical computer model was proposed for the simulation of 2-dimensional local ion implantation into a target with an arbitrary geometry. The model involved an algorithm for the numerical solution of the boundary value problem for the Boltzmann transport equation in 2 dimensions, and permitted the calculation of the angular and energy distribution functions of particles which moved within a multi-layered multi-component target.

F.F.Komarov, I.E.Mozolevski, V.P.Rogach: Radiation Effects and Defects in Solids, 1995, 133[2], 133-9