Hydrogenated amorphous films were annealed (220 to 270C, 24 to 48h) under intense visible light (4 to 16W/cm2) or in the dark. After annealing, the H concentration profile was measured by means of Rutherford back-scattering spectrometry and elastic recoil detection ion-beam analytical methods. A model was proposed which showed that, in good agreement with the present results, the H diffusion coefficient was proportional to the illuminating power and to the loosely bonded H concentration.

O.Greim, J.Weber, Y.Baer, U.Kroll: Physical Review B, 1994, 50[15], 10644-8