The vibrational spectroscopy of NNO defects which were introduced by 16O, 14N and 15N ion implantation was studied; especially with regard to N-isotopic shifts of the localized vibrational modes. The investigations showed that the local modes of the 3 impurity atoms which comprised the defect were only weakly coupled dynamically. First-principles cluster calculations were made of the local mode frequencies of the defect. Several models were investigated, and it was concluded that a model which consisted of a bridging O atom adjacent to the N pair defect accounted for its dynamic properties.

R.Jones, C.Ewels, J.Goss, J.Miro, P.Deák, S.Oberg, F.B.Rasmussen: Semiconductor Science and Technology, 1994, 9[11], 2145-8