The microstructures of nominally undoped epitaxial wurtzite-structured films of -type material, which had been grown by means of gas-source molecular beam epitaxy, plasma-assisted molecular beam epitaxy, or metalorganic chemical vapor deposition, were investigated by using transmission electron microscopy. The results showed that undoped films had an ordered point defect structure. A model for this defect-ordered microstructure was based upon a comparison of experimental results and computer simulations.

H.Z.Xiao, N.E.Lee, R.C.Powell, Z.Ma, L.J.Chou, L.H.Allen, J.E.Greene, A.Rockett: Journal of Applied Physics, 1994, 76[12], 8195-7