Samples were implanted with 50keV N+ ions to a fluence of 1017/cm2. The beam current density ranged from 6 to 60A/cm2. The implantation was carried out at 150C in order to favor carburization. The depth profiles of implanted N were determined by exploiting the 15N(p,) nuclear reaction or by using Auger electron spectroscopy when 15N or 14N ions, respectively, were implanted. It was shown that, at 150C, the beam current density played an important role in the migration of N.

N.Millard-Pinard, H.Jaffrezic, G.Marest, N.Moncoffre, J.Tousset, B.Rauschenbach: Radiation Effects and Defects in Solids, 1994, 128[4], 295-305