An analysis was made of 2-dimensional surface source and implant problems for a substitutional-interstitial diffusion model. Asymptotic solutions were presented in the limit where the surface concentration of impurity (or peak concentration of the implant) was far greater than the equilibrium vacancy concentration. By using composite solutions, contours of constant impurity concentration were plotted. Some of these contours differed markedly from those for the corresponding linear problem, and exhibited the so-called bird’s beak shape which was frequently observed in experiments. A 2-dimensional surface source problem for a vacancy model was also considered.

M.G.Meere, J.R.King, T.G.Rogers: Proceedings of the Royal Society A, 1995, 448[1932], 213-36