A transmission electron microscopic study was made of plan-view and cross-sectional samples of epitaxial laterally overgrown samples. Two types of dislocation, having the same type of Burgers vector but different line directions, were observed. It was shown that threading edge dislocations bent so as to form dislocation segments, in the c-plane, as a result of shear stresses which developed in the wing material along the stripe direction. It was shown that the migration of these dislocations involved both glide and climb. The propagation of threading parts over the wing area indicated the presence of a high density of point defects in the wing areas.

Microstructure of Laterally Overgrown GaN Layers. Z.Liliental-Weber, D.Cherns: Journal of Applied Physics, 2001, 89[12], 7833-40