A review was presented of the electron paramagnetic resonance and localized vibrational mode spectroscopy of isolated lattice vacancies and self-interstitials, and their interactions with other defects. This information was expected to help to clarify many of the complex processes and structures which were involved in crystal growth and radiation damage.

Intrinsic Defects in Silicon. G.D.Watkins: Materials Science in Semiconductor Processing, 2000, 3[4], 227-35