Dislocation arrangements in an Al layer with a (111) fibre texture, on an oxidized (100) Si substrate, were investigated by means of X-ray diffraction line broadening. Tensile stresses were introduced into the layer by annealing (1h, 673K) and then cooling to room temperature. After cooling, the dislocation arrangement was investigated as a function of time by monitoring the diffraction-line broadening of 2 diffraction lines. It was found that mainly screw dislocations were present, with their Burgers vectors inclined to the specimen surface. The dislocation density decreased as a function of time, and an increasing outer cut-off radius was identified.

Measurement of Dislocation Distributions by Means of X-Ray Diffraction. J.D.Kamminga, R.Delhez: Materials Science and Engineering A, 2001, 309-310, 55-9