Undoped natural (100)-, (111)- and (110)-oriented diamonds were exposed to microwave D plasma. Static-mode secondary ion mass spectroscopy showed that the surface D concentration was highest for the (110) surface and lowest for the (100)-oriented diamond. Secondary ion mass spectrometry depth-profile measurements revealed the bulk diffusion of D at concentrations of 1020 to 1021/cm3. The relative bulk concentrations of D in the variously oriented diamonds reflected those at the surface. The measured diffusion length of D was about 0.6µm.

Bulk Diffusion of Microwave Plasma Activated Deuterium into Undoped Natural Diamond. A.Laikhtman, A.Hoffman, C.Cytermann: Applied Physics Letters, 2001, 79[8], 1115-7