The redistribution of N which had been implanted into synthetic diamond crystals was investigated by means of secondary ion mass spectrometry during isothermal annealing (1400C, 1 to 20h). It was shown that the N profiles spread at the macroscopic scale, and that the broadening was well described in terms of the diffusive movement of impurity atoms. The preliminary estimates of the diffusion coefficients were: 2.3 x 10-15cm2/s for 1h annealing, 8.5×10-16cm2/s for 5h annealing and 3.7 x 10-16cm2/s for 20h annealing.

Redistribution of Nitrogen Implanted in Crystals of Synthetic Diamond. E.I.Cherepov, E.G.Tishkovsky, V.I.Obodnikov, J.N.Palyanov, A.G.Sokol, N.V.Sobolev: Nuclear Instruments and Methods in Physics Research B, 2001, 183[3-4], 301-4