Synchrotron white-beam topography was used to study defects in 6H-type platelets which had been grown by using the Lely method. High-resolution X-ray diffraction, chemical etching, capacitance-voltage and photoluminescence measurements were also used to complement the topographic results. Structural defects, such as misorientations, dislocations and stacking faults were classified into grown-in and post-growth defects. The results were related to the growth process of variously shaped platelets.

Nature and Occurrence of Defects in 6H-SiC Lely Crystals. M.Tuominen, A.Ellison, T.Tuomi, R.Yakimova, S.Milita, E.Janzen: Journal of Crystal Growth, 2001, 225[1], 23-33