Cubic SiC layers which were grown onto Si(110) surfaces contained a high density of widely-spread and intersecting stacking faults. Weak-beam transmission electron microscopy was used to determine the possible Burgers vectors of widely-spread Shockley partial dislocations and sessile partial dislocations. Partial Shockley dislocations which restricted non-intersecting stacking faults were characterized, and a stacking-fault energy of 0.1mJ/m2 was determined. Edge sessile dislocations with 1/8<110> and 1/3<001> Burgers vectors were identified at the stacking-fault intersections.

On the Determination of Partial Dislocation Burgers Vectors in FCC Lattices and its Application to Cubic SiC Films. U.Kaiser, I.I.Khodos: Philosophical Magazine A, 2002, 82[3], 541-51