The lattice location of Fe in thin films of monocrystalline hexagonal material was studied by means of emission channelling. Following the 60keV room-temperature implantation of the precursor isotope 59Mn to a dose of 1 x 1013/cm2, and annealing at up to 900C, the angular distribution of β-particles emitted by radioactive 59Fe was measured by using a position-sensitive electron detector. The β-emission patterns around the [00•1], [¯11•2], [¯11•1] and [¯21•3] directions provided direct evidence that the majority (80%) of Fe occupied substitutional Ga sites.

Direct Evidence for Implanted Fe on Substitutional Ga Sites in GaN. U.Wahl, A.Vantomme, G.Langouche, J.G.Correia, L.Peralta, Isolde: Applied Physics Letters, 2001, 78[21], 3217-9