The numerous possible interpretations of the electron paramagnetic resonance results obtained for nuclear transmutation P-doped 6H-SiC were considered. At least 6 different P-related donor defects were observed. Among these defects, only 2 could be unambiguously attributed to the shallow P donor on both quasi-cubic sites. The others remained controversial. Preliminary results of a high-frequency photoluminescence-detected magnetic resonance investigation of P-doped 6H-SiC were presented in which doping was carried out in situ during PVT growth. Along with Al, B and N, two new defects were observed with lines at g = 2.010 and 2.009 for B||c. They had been observed previously and were associated with P-defects identified with conventional electron paramagnetic resonance at 9GHz.

Magnetic Resonance Investigation of P-Doped 6H-SiC. M.V.B.Pinheiro, S.Greulich-Weber, J.M.Spaeth: Physica B, 2003, 340-342, 146-50