The influence of low-energy Pt atom impacts on the Pt(111) surface was studied by using molecular dynamics simulations. Atomic interaction potentials and the embedded atom method were used in the simulation. The kinetic energy of incident atom changed from 0.1 to 200eV and the substrate temperature was fixed at 300K. It was found that there was a threshold energy of about 40eV for sputtering. When the incident energy was higher than the threshold energy, the sputtering yield, adatom yield and vacancy yield increased

with the increase of incident energy and adatoms came mainly from the first layer of the substrate. The dependence of the adatom, vacancy and sputtering yields on the incident energy and the relative atomistic mechanisms were discussed.

Adatom, Vacancy and Sputtering Yields of Low-Energy Pt Atom Impacts on Pt(111) by Molecular Dynamics Simulation. H.F.Lu, C.Zhang, Q.Y.Zhang: Nuclear Instruments and Methods in Physics Research B, 2003, 206, 22-6