The concentration profiles of an impurity diffusing in a solid with the formation and decay of immobile complexes were determined. Formulas describing the impurity distribution were obtained by transformation of a solution of the problem of free impurity diffusion under the same initial and boundary conditions.

Diffusion with the Formation and Decay of Immobile Complexes in Solids. R.S.Malkovich: Technical Physics Letters, 2003, 29[5], 422-5