The role of step edge diffusion in epitaxy was discussed using kinetic Monte Carlo simulations. Three models with different rates of edge diffusion were investigated. Increasing the rate of edge diffusion resulted in an early onset of second layer nucleation, pattern formation in thick films, and increased surface roughness. An expression for the uphill current due to edge diffusion was derived in the limit of fast edge diffusion.

Influence of Step Edge Diffusion on Surface Morphology during Epitaxy. M.V.R.Murty, B.H.Cooper: Surface Science, 2003, 539[1-3], 91-8