Pyramidal structured epilayers with mirror-like {100} and {111} facets were grown onto GaSb(100) patterned substrates by liquid-phase epitaxy. The {111} facets were identified as 2 different faces: (111) and (¯1¯1¯1). Study of the cross-section revealed that the pyramidal structure was hollow. Due to the presence of a masking layer and hollow space, both the epitaxial lateral overgrowth layer and the top portion of the epilayer were of high quality. This indicated that the hollow pyramidal structure had a defect filtration effect.
Defect Filtration of Hollow Pyramidal Structured GaSb Epilayers Grown on GaSb Patterned Substrates by Liquid Phase Epitaxy. G.Zhang, K.Balakrishnan, T.Koyama, M.Kumagawa, Y.Hayakawa: Journal of Crystal Growth, 2003, 256[3-4], 243-7