Investigation of a surface patterned by buried dislocation networks was performed with grazing incidence X-ray scattering. It was shown that surface long-range undulations led to a azimuth-dependent diffusion spot, the scattering vector of which was mainly parallel to the X-ray propagation direction. This unusual scattering direction with grazing incidence X-ray scattering was explained by the scales of the scattering objects. A geometrical model was proposed to extract the periodicity of the surface from grazing incidence X-ray scattering.

Grazing Incidence X-ray Scattering Investigation of Si Surface Patterned with Buried Dislocation Networks. F.Leroy, J.Eymery, D.Buttard, G.Renaud, R.Lazzari, F.Fournel: Applied Physics Letters, 2003, 82[16], 2598-600