Dynamics of the surface relief on a Si(111) single crystal face of a sample subjected to biaxial lateral extension after mechanical or chemical polishing was studied by using scanning tunneling microscopy. In both cases, despite certain differences, the sample surface exhibited evidence of relief dynamics on a nm-scale and exhibited a fractal character of the spatial structure formed in late stages of the process.

Features of Defect Formation on a Deformed Si(111) Surface. V.I.Betekhtin, N.N.Gorobeĭ, V.E.Korsukov, A.S.Lukyanenko, B.A.Obidov, A.N.Tomilin: Technical Physics Letters, 2002, 28[11], 893-5