determination of the Burgers vectors of a large number of interfacial misfit dislocations in mismatched heterostructures. The method combines large-area plan-view thinning of the sample for creating a strongly bent electron transparent foil with the analysis of the splitting and displacement of bend contours at their crossings with the misfit dislocations. The Burgers vector analysis was demonstrated for 60º misfit dislocations in a low-mismatched SiGe/Si(001) heterostructure. Crossings of various bend contours with the misfit dislocations were analyzed with respect to their information content for the Burgers vector analysis. In future applications the method may be used for analyzing such a large number of misfit dislocations that a quantitative comparison with X-ray diffraction experiments, especially with data on diffusely scattered X-rays originating from the strain fields around the dislocations, became possible.

Burgers Vector Analysis of Large Area Misfit Dislocation Arrays from Bend Contour Contrast in Transmission Electron Microscope Images. E.Spiecker, W.Jäger: Journal of Physics - Condensed Matter, 2002, 14[48], 12767-76