The role of the free surface in determining the equilibrium position of misfit dislocations in thin epitaxial films was considered. When the film was elastically stiffer than the substrate, the core of the dislocation was predicted to lie at some distance from the interface in the softer substrate. On the other hand, when the film was softer than the substrate, the core of the dislocation was always predicted to lie close to the interface.

Equilibrium Position of Misfit Dislocations in Thin Epitaxial Films. X.Wu, G.C.Weatherly: Semiconductor Science and Technology, 2003, 18, 307-11