Nanocrystalline films were prepared via ion bombardment-assisted gas vapor synthesis. The phase quality, morphology and microstructure of the films were investigated by means of Raman spectroscopy, scanning electron microscopy and high-resolution transmission electron microscopy. The grain size of the film ranged from several nm to several tens of nm. There was a high density of lattice defects, mainly stacking faults and twin boundaries, in the nanocrystals. Lattice distortions, vacancies and dislocations were observed. The growth of nanocrystals, and the mechanism of defect formation, were analyzed in terms of the ion impact effect.

Structure and Defects of Vapor-Phase Grown Diamond Nanocrystals. X.Jiang, C.L.Jia: Applied Physics Letters, 2002, 80[13], 2269-71