The lattice location of Fe in thin films of monocrystalline hexagonal material was studied by means of emission channelling. Following 60keV room-temperature implantation of the precursor isotope, 59Mn, to a dose of 1013/cm2 (and annealing at up to 900C) the angular distribution of β-particles emitted by radioactive 59Fe was measured by using a position-sensitive electron detector. The β-emission patterns around the [00•1], [¯11•2], [¯11•1] and [¯21•3] directions furnished direct evidence that most (80%) Fe occupied substitutional Ga sites.

Direct Evidence for Implanted Fe on Substitutional Ga Sites in GaN. U.Wahl, A.Vantomme, G.Langouche, J.G.Correia, L.Peralta, Isolde: Applied Physics Letters, 2001, 78[21], 3217-9