A theoretical study was made of the diffusion barriers, Ti and Cu, in crystalline samples, and of the interactions between these elements and H. Calculations were performed by using molecular cluster and Hartree-Fock methods. Use of the partial retention of diatomic differential overlap method predicted diffusion barriers of 3.29eV for Ti+, 2.25eV for Tio, and 0.24eV for Cu+. The latter method also predicted that substitutional Tio was a deep trap for interstitial H, with a gain in energy of 1.84eV (relative to atomic H which was far from the cluster). First-principles Hartree-Fock calculations showed that a Ti+ ion at a tetrahedral interstitial site also formed a bond with interstitial H. This involved a dissociation energy of 2.31eV. On the other hand, interstitial Cu+ did not form a bond with H.

D.E.Woon, D.S.Marynick, S.K.Estreicher: Physical Review B, 1992, 45[23], 13383-9

 

Table 164

Diffusivity of H in Polycrystalline Si

 

Material

Source

T (C)

D (cm2/s)

LPCVD

plasma

452

9.0 x 10-13

LPCVD

plasma

392

2.1 x 10-13

LPCVD

plasma

350

1.4 x 10-13

LPCVD

plasma

325

8.7 x 10-14

LPCVD

plasma

248

9.7 x 10-15

SSC

plasma

452

3.8 x 10-13

SSC

plasma

452

1.6 x 10-13

SSC

plasma

452

1.4 x 10-13

SSC

plasma

401

1.0 x 10-13

SSC

plasma

350

7.0 x 10-13

SSC

plasma

350

5.0 x 10-13

SSC

plasma

350

3.8 x 10-13

SSC

plasma

248

5.3 x 10-13

SSC

plasma

248

3.5 x 10-13

SSC

plasma

248

3.0 x 10-13

LPCVD

layer

421

6.3 x 10-14

LPCVD

layer

350

2.1 x 10-14

LPCVD

layer

298

1.3 x 10-14

SSC

layer

452

7.1 x 10-14

SSC

layer

421

1.2 x 10-14

SSC

layer

350

1.7 x 10-15

SSC

layer

298

4.1 x 10-17