Complexes of O and N were formed in Czochralski-type material upon annealing in a N atmosphere. By fitting the depth profile of the defect to a diffusion equation, it was deduced that the diffusion coefficient of N was about 2 x 10-6cm2/s at 1270C. This value was some 105 times larger than those previously reported.

A.Hara, T.Fukuda, T.Miyabo, I.Hirai: Applied Physics Letters, 1989, 54[7], 626-8