The concentration profiles of V, at annealing temperatures of between 600 and 1200C (table 224), were measured by means of deep-level transient spectroscopy. On the basis of the data, it was found that the diffusivity could be described by:

D(cm2/s) = 0.0090 exp[-1.55(eV)/kT]

T.Sadoh, H.Nakashima: Applied Physics Letters, 1991, 58[15], 1653-5