It was shown that binding energies and rate constants for the kick-out reaction were not essential parameters for the simulation of impurity diffusion. This led to a reduction in the number of parameters. It was found that transient enhanced B diffusion would be underestimated, due to self-interstitial undersaturation, if a large binding energy was assumed. However, the simulated results were fairly insensitive to variations in the energy values, provided that these values were sufficiently low. It was also concluded that the kick-out reaction was fast enough to achieve local equilibrium, even within a short time, at low temperatures. Provided that the values of the rate constants of the kick-out reaction in simulations were high enough, local equilibrium could be satisfactorily achieved, and the simulated results were almost entirely independent of the values of the parameters.

Reduction of the Number of Parameters for the Simulation of Impurity Diffusion. M.Uematsu: Japanese Journal of Applied Physics - 1, 1997, 36[12A], 7100-3