Laser-stimulated doping with Mg was studied, following thermal diffusion. It was shown that 1.06μm Nd laser irradiation led to an increase in the solubility and diffusion coefficient of Mg. The laser irradiation also led to the formation of Mg centres with energy levels at Ec - 0.13eV and Ec - 0.28eV.

Laser-Stimulated Doping of Silicon with Magnesium V.M.Aroutiounian, A.P.Hakhoyan, Z.N.Adamian, R.S.Barseghian: Modern Physics Letters B, 1999, 13[14], 479-84