Kinetic lattice Monte Carlo simulations were made of the (100) surface. By taking account of the known anisotropy produced by surface reconstruction, the diffusion properties of Si ad-dimers on the surface were examined as a function of temperature and were compared with scanning tunnelling microscopy measurements.

Kinetic Lattice Monte Carlo Simulations of Ad-Dimer Diffusion on the Silicon (100) Surface. R.Akis, D.K.Ferry: Journal of Computational Electronics, 2003, 2[2-4], 497-500