Enhanced Sb diffusion was investigated in biaxially compressed Si1-xGex layers, where x was equal to 0.1 or 0.2. It was shown that the contribution of biaxial strain to the enhancement increased, with increasing misfit compression, from a factor of about 3 at 0.73GPa (x = 0.1) to about 10 at 1.40GPa (x = 0.2). By assuming that the pre-factors were independent of stress, the Sb diffusion coefficients in biaxially compressed Si0.9Ge0.1 and Si0.8Ge0.2 (table 27) could be described by:
D (cm2/s) = 40 exp[-3.98(eV)/kT]
and
D (cm2/s) = 130 exp[-3.85(eV)/kT]
respectively.
Sb-Enhanced Diffusion in Strained Si1-xGex A.J.Kuznetsov, J.Cardenas, D.C.Schmidt, B.G.Svensson, J.L.Hansen, A.N.Larsen: Physical Review B, 1999, 59[11], 7274-7
Table 28
Bulk Diffusivity of Sb in Si1-xGex Layers in Various Stress States
Temperature (C) | x | Stress State | D (cm2/s) |
700 | 0.07 | compression | 3.8 x 10-19 |
700 | 0.09 | compression | 8.8 x 10-19 |
700 | 0.15 | compression | 1.4 x 10-18 |
700 | 0.18 | compression | 5.5 x 10-18 |
750 | 0.00 | compression | 1.7 x 10-18 |
750 | 0.03 | compression | 1.1 x 10-18 |
750 | 0.07 | compression | 2.7 x 10-18 |
750 | 0.09 | compression | 3.8 x 10-18 |
750 | 0.15 | compression | 8.8 x 10-18 |
750 | 0.18 | compression | 1.3 x 10-17 |
800 | 0.00 | compression | 8.6 x 10-18 |
800 | 0.03 | compression | 1.0 x 10-17 |
800 | 0.07 | compression | 2.0 x 10-17 |
800 | 0.09 | compression | 6.3 x 10-17 |
800 | 0.15 | compression | 1.1 x 10-16 |
800 | 0.18 | compression | 1.4 x 10-16 |
850 | 0.00 | compression | 7.8 x 10-17 |
850 | 0.03 | compression | 4.1 x 10-17 |
850 | 0.07 | compression | 7.2 x 10-17 |
850 | 0.09 | compression | 9.5 x 10-17 |
850 | 0.15 | compression | 2.8 x 10-16 |
900 | 0.00 | compression | 2.3 x 10-16 |
900 | 0.03 | compression | 2.0 x 10-16 |
Table 28 (continued)
Bulk Diffusivity of Sb in Si1-xGex Layers in Various Stress States
Temperature (C) | x | Stress State | D (cm2/s) |
700 | 0.09 | relaxed | 5.9 x 10-19 |
700 | 0.18 | relaxed | 1.3 x 10-18 |
750 | 0.09 | relaxed | 3.6 x 10-18 |
750 | 0.18 | relaxed | 4.5 x 10-18 |
800 | 0.09 | relaxed | 4.8 x 10-17 |
800 | 0.18 | relaxed | 5.2 x 10-17 |
850 | 0.09 | relaxed | 1.5 x 10-16 |
700 | 0.09 | tension | 4.4 x 10-19 |
700 | 0.18 | tension | 8.5 x 10-19 |
750 | 0.09 | tension | 3.6 x 10-18 |
750 | 0.18 | tension | 4.3 x 10-18 |
800 | 0.09 | tension | 3.8 x 10-17 |
800 | 0.18 | tension | 4.9 x 10-17 |
850 | 0.09 | tension | 1.3 x 10-16 |