The micropipe formation in 6H-SiC single crystal fabricated by sublimation method was investigated via a stacking fault with a core of inclusion model. Sizes, shapes and the density of micropipes were investigated and the inclusions in the micropipes and the stacking faults were analyzed. Stacking faults and inclusions were the 2 necessary conditions for the formation of the micropipes. The shapes of micropipes were determined by the stacking fault tracks, and their sizes and density were mainly done by the sizes and number of the inclusions.

Model for Micropipe Formation in 6H-SiC Single Crystal by Sublimation Method. J.Liu, J.Gao, J.Cheng, J.Yang, G.Qiao: Materials Letters, 2005, 59[18], 2374-7