To improve electric properties of oxide ion conducting yttria-stabilized zirconia films at low temperatures, a mechanical distortion was induced by a piezoelectric actuator. Films containing 8mol%Y2O3 were prepared by metalorganic chemical vapor deposition. The film was placed on a lead zirconate titanate multilayer piezoelectric actuator. The effect of piezoelectric vibration on electric properties of the ZrO2 film was investigated. The resistivity of the ZrO2 film decreased with increasing amplitude of the piezoelectric vibration. The electrical conductivity of the ZrO2 film at 353K, vibrated by the actuator, was 2 x 10-6S/m: 103 times greater than that without vibration.

Ionic Conductivity Enhancement of YSZ Film Induced by Piezoelectric Vibration. H.Masumoto, T.Goto: Materials Transactions, 2004, 45[2], 240-3