This contribution reports the study, by junction spectroscopies, of electronic states induced by thermal and deformation treatments in p-type Si. In order to understand the role that O precipitation, metallic contamination and plastic deformation play on the defect states, several sets of Czochalski and float-zone Si samples and different material treatments were investigated. The electronic states were also compared with optical transitions obtained by photoluminescence analyses carried out on the same sample sets. These defect states could thus be microscopically identified with specific defect types.

Defect States in Czochralski p-Type Silicon - the Role of Oxygen and Dislocations. A.Castaldini, D.Cavalcoli, A.Cavallini, S.Pizzini: Physica Status Solidi A, 2005, 202[5], 889-95