A modified laser shock peening technique was used to generate plastic deformation in Si crystals. The induced dislocation activity in Si crystal was studied via integrated shock dynamics and multi-scale dislocation dynamics plasticity simulations. This laser shock peening process could also be applied to other brittle materials in order to generate plastic deformation.

Dislocation Behavior in Silicon Crystal Induced by Laser Shock Peening - a Multiscale Simulation Approach. G.J.Cheng, M.A.Shehadeh: Scripta Materialia, 2005, 53[9], 1013-8