A defect–deformation model of irregular rough microstructure formation on the surface of semiconductors and metals under laser irradiation was developed. The defect–deformation model described the development of roughness on various (from μm to nm) scales and agrees with the experimental data on the relationships between the surface roughness scale and the parameters of laser radiation and processed materials. Possibilities of controlled modification of the characteristics of laser-induced roughness by means of external actions were considered.

A Defect–Deformation Model of the Surface Roughness Formation in Semiconductors and Metals under Laser Irradiation. V.I.Emelyanov, K.M.Karimov: Technical Physics Letters, 2005, 31[3], 258-60