By combining weak-beam dark-field imaging with tomography, it was possible to reconstruct the 3-dimensional structure of dislocation arrays in GaN. Using a mixture of threading and in-plane dislocations, produced by plastic relaxation of the film, it was considered how well each dislocation was reconstructed and what limits were imposed with regard to dislocation density and material anisotropy.

Weak-Beam Dark-Field Electron Tomography of Dislocations in GaN. J.S.Barnard, J.Sharp, J.R.Tong, P.A.Midgley: Journal of Physics - Conference Series, 2006, 26, 247-50