In order to understand the vertical and lateral growth mechanisms of micro-channel epitaxy, 2-dimensional numerical calculations were performed for various boundary conditions on the top and side surfaces of the micro-channel epitaxy island. By solving a 2-dimensional diffusion equation, the solute concentration profile was determined as a function of the growth time. By calculating the lateral growth rate, the width/thickness ratio of the island was derived. The calculated ratio exhibited good agreement, with regard to both the cooling-rate and growth-temperature dependence, when compared with experimental data for growth temperatures above 500C.

Two-Dimensional Numerical Calculation of Solute Diffusion in Microchannel Epitaxy of InP Z.Yan, S.Naritsuka, T.Nishinaga: Journal of Crystal Growth, 2000, 208[1-4], 1-7