An attempt was made to prepare thin films by using pulsed-laser-deposition and magnetron sputtering. The Mg and B were deposited onto various substrates under different vacuum conditions. The pulsed-laser deposition method was used to fabricate Mg and B sandwiches at room temperature, and the multi-layer system was then annealed in situ at various temperatures. An attempt was also made to co-deposit Mg and B under high vacuum (5 x 10-5Pa) onto heated substrates by using pulsed-laser deposition. Superconducting MgB2 thin films were successfully grown onto an STO (100) substrate by using magnetron sputtering. The onset transition temperature was 37K and the zero resistance temperature was 34K.

Growth and Superconductivity Characteristics of MgB2 Thin Films. K.Chen, P.Ma, R.J.Nie, T.Yang, F.X.Xie, L.Y.Liu, S.Z.Wang, Y.D.Dai, F.Wang: Superconductor Science and Technology, 2002, 15, 1721-4