Changes in concentration profiles due to interdiffusion during annealing were investigated by means of the Auger electron spectroscopic depth profiling of multi-layered films. It was observed that the initial concentration distributions, which were almost rectangular in unheated samples, changed into sinusoidal ones in films which were annealed at various temperatures. The concentration-independent interdiffusion coefficients were deduced from the amplitudes of the sinusoidal distributions. The activation energy was found to be equal to 1.66eV. The concentration-dependent interdiffusivity at 150C was also estimated by using Boltzmann-Matano methods.

I.J.Jeon, J.H.Hong, Y.P.Lee: Journal of Applied Physics, 1994, 75[12], 7825-8