Microscopic experimental data on the distribution of vacancies created in isolated implantation events were reported for the model system B in Cu. An interstitial-to-substitutional conversion process of the implanted 12B ions was utilized to detect lattice damage. Vacancy clouds were observed having well-defined edges and a mean radius of 13.5nm. The radial profile of the local vacancy concentration never exceeded 10–4; it was almost flat in the central region before it fell off rapidly, a behavior which could not be explained by simple binary-collision computer models.

Vacancy Distribution around Isolated Implantation Sites. B.Ittermann, M.Füllgrabe, H.J.Stöckmann, F.Kroll, D.Peters, H.Ackermann: Applied Physics Letters, 2005, 87[13], 131907 (3pp)