Measurements providing experimental evidence for linear interface shift and interface sharpening, as typical diffusion phenomena on a nanoscale, in different bi- or multilayer systems (Si/Ge, Cu/Ni, Mo/V) and results of computer simulations were presented on the basis of research experience. Special emphasis was given to sample preparation and measuring techniques capable of diffusion measurements on the nanoscale.

Diffusion on the Nanometer Scale. D.L.Beke, Z.Erdélyi, G.A.Langer, A.Csik, G.L.Katona: Vacuum, 2005, 80[1-3], 87-91