An investigation was made of the filtering of dislocations at the interfaces between AlxIn1−xSb and AlyIn1−ySb layers. Transmission electron microscopic analysis showed that the threading dislocation density was reduced by 30 to 50% at the Al0.12In0.88Sb/Al0.24In0.76Sb interfaces studied. Analyses based upon the invisibility criterion were performed for a representative dislocation: through a glide motion in the {111} plane, a threading dislocation was bent out at the interface to make a <110>-directional 60° misfit dislocation segment. Splitting and no-splitting crossings of misfit dislocations were observed. This suggested that the elongation of misfit dislocations during the layer growth, which may be a crucial process of the threading dislocation annihilation mechanism, could occur even if other orthogonal misfit dislocations were situated in the elongation path.

Dislocation Filtering at the Interfaces between AlxIn1-xSb and AlyIn1-ySb Layers. T.D.Mishima, M.Edirisooriya, M.B.Santos: Physica B, 2006, 376-377, 591-4