Accurate conversion factors were derived for the estimation of the concentrations of interstitial O from low-temperature local vibrational mode absorption at 1136, 1128 and 1205/cm. The absorption spectra at 6K were fitted with various functions in order to extract the relevant amplitudes in an accurate and reproducible manner. The ratio of the room-temperature amplitude to the low-temperature amplitude then gave the conversion factors for 6K. On the basis of a phonon model, and occupation statistics, use of the conversion factors was extended to temperatures as high as 100K; while taking account of broadening of the absorption peaks and of variations in the occupation of the various excited states.

Quantification of the Low Temperature Infrared Vibrational Modes from Interstitial Oxygen in Silicon O.De Gryse, P.Clauws: Journal of Applied Physics, 2000, 87[7], 3294-300