Diffusion studies were performed using isotopically enriched elemental and compound semiconductors. Recent results weed highlighted here and it was demonstrated that the use of isotopically enriched materials ushered in a new era in the study of diffusion in solids, which yields greater insight into the properties of native defects and their roles in diffusion. This approach to studying atomic diffusion was not limited to semiconductors and could be applied also to other material systems. Current areas of research concerned the diffusion in the silicon–germanium alloys and glassy materials such as silicon dioxide and ion conducting silicate glasses.

Advanced Diffusion Studies with Isotopically Controlled Materials. H.A.Bracht, H.H.Silvestri, E.E.Haller: Solid State Communications, 2005, 133[11], 727-35