Speeding up of step-density oscillations damping on singular surface with Schwoebel barriers was demonstrated by Monte Carlo simulation. Estimation of Schwoebel barrier necessary for complete absence of step-density oscillations was carried out. Increase of atomic surface anisotropy was shown to be responsible for slowing down the step-density oscillation damping and oscillation phase-shift for anisotropy similar to anisotropy on (001) reconstructed surfaces.

Influence of Schwoebel Barrier and Diffusion Anisotropy on Step Density Oscillation Amplitude during Epitaxial Growth. I.G.Neizvestny, N.L.Shwartz, Z.S.Yanovitskaja: Computational Materials Science, 2006, 36[1-2], 180-3