The use of so-called high mobility substrates in association with defect generation, and its impact upon electrical device parameters was reviewed. The global or local strain engineering has to be optimized in order to avoid the harmful effects of stress-induced misfit and threading dislocations.

Defect Control in Advanced High-Mobility Substrates. C.Claeys, E.Simoen: Journal of Physics - Conference Series, 2005, 10, 125-30