Diffuse elastic scattering of electrons by single nm-sized defects in ion-irradiated Au was measured quantitatively. Diffuse scattering from isolated single dislocation loops was separated from Bragg scattering at a weakly excited diffraction peak. Results were compared with calculations for diffuse scattering of X-rays and electrons. The pattern in the diffuse scattering within a single reciprocal lattice plane often revealed the loop geometry, size, and interstitial or vacancy nature. Defect images using only diffuse scattering were achieved with high sensitivity and good resolution by a hollow-cone dark-field method.

Diffuse Elastic Scattering of Electrons by Individual Nanometer-Sized Dislocation Loops. M.A.Kirk, M.L.Jenkins, Z.Zhou, R.D.Twesten, A.P.Sutton, S.L.Dudarev, R.S.Davidson: Philosophical Magazine, 2006, 86[29-31], 4797-808