Dense Pd membranes with a thickness of about 2.5μm were fabricated by means of micro-fabrication. The H permeation of the thin Pd membrane was investigated at 473 to 673K by using conventional gas permeation methods. The H permeability of the thin Pd membrane was 50 to 65% of that of a Pd membrane with a thickness of about 0.70mm. The pressure exponent for permeation through the thin Pd membrane decreased from 0.86 to 0.73 when the permeation temperature was increased from 473 to 673K. Grain growth was detected in the thin Pd membrane after permeation. Moreover, CO2 gas apparently had negative effects upon the H permeation of the thin Pd membrane. This was suggested to be related to the chemisorptions of CO2 on the surface of the Pd membrane.

Hydrogen Permeation Characteristics of Thin Pd Membrane Prepared by Microfabrication Technology. Y.Zhang, J.Gwak, Y.Murakoshi, T.Ikehara, R.Maeda, C.Nishimura: Journal of Membrane Science, 2006, 277[1-2], 203-9